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Literature DB >> 26257314

Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition.

Chisung Ahn¹, Jinhwan Lee², Hyeong-U Kim¹, Hunyoung Bark¹, Minhwan Jeon¹, Gyeong Hee Ryu³, Zonghoon Lee³, Geun Young Yeom^1,4, Kwangsu Kim⁵, Jaehyuck Jung¹, Youngseok Kim², Changgu Lee^1,2, Taesung Kim^1,2.

Abstract

By plasma-enhanced chemical vapor deposition, a molybdenum disulfide (MoS2 ) thin film is synthesized directly on a wafer-scale plastic substrate at below 300 °C. The carrier mobility of the films is 3.74 cm(2) V(-1) s(-1) . Also, humidity is successfully detected with MoS2 -based sensors fabricated on the flexible substrate, which reveals its potential for flexible sensing devices.

Entities: Chemical

Keywords: flexible sensor; low temperature; molybdenum disulfide (MoS2); plasma-enhanced chemical vapor deposition (PECVD); plastic substrate

Year: 2015 PMID： 26257314 DOI： 10.1002/adma.201501678

Source DB: PubMed Journal: Adv Mater ISSN： 0935-9648 Impact factor: 30.849

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Cited

11 in total

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Journal: Sci Rep Date: 2022-06-20 Impact factor: 4.996

Review 2. MoS₂ as a Co-Catalyst for Photocatalytic Hydrogen Production: A Mini Review.

Authors: Sayyar Ali Shah; Iltaf Khan; Aihua Yuan
Journal: Molecules Date: 2022-05-20 Impact factor: 4.927

3. Investigating the Effect of Steric Hindrance within CdS Single-Source Precursors on the Material Properties of AACVD and Spin-Coat-Deposited CdS Thin Films.

Authors: Mark A Buckingham; Kane Norton; Paul D McNaughter; George Whitehead; Inigo Vitorica-Yrezabal; Firoz Alam; Kristine Laws; David J Lewis
Journal: Inorg Chem Date: 2022-05-18 Impact factor: 5.436

4. Booming Development of Group IV-VI Semiconductors: Fresh Blood of 2D Family.

Authors: Xing Zhou; Qi Zhang; Lin Gan; Huiqiao Li; Jie Xiong; Tianyou Zhai
Journal: Adv Sci (Weinh) Date: 2016-06-22 Impact factor: 16.806

5. Growth of Multiorientated Polycrystalline MoS₂ Using Plasma-Enhanced Chemical Vapor Deposition for Efficient Hydrogen Evolution Reactions.

Authors: Na Liu; Jeonghun Kim; Jeonghyeon Oh; Quang Trung Nguyen; Bibhuti Bhusan Sahu; Jeong Geon Han; Sunkook Kim
Journal: Nanomaterials (Basel) Date: 2020-07-27 Impact factor: 5.076

6. Layer-by-layer epitaxy of multi-layer MoS₂ wafers.

Authors: Qinqin Wang; Jian Tang; Xiaomei Li; Jinpeng Tian; Jing Liang; Na Li; Depeng Ji; Lede Xian; Yutuo Guo; Lu Li; Qinghua Zhang; Yanbang Chu; Zheng Wei; Yanchong Zhao; Luojun Du; Hua Yu; Xuedong Bai; Lin Gu; Kaihui Liu; Wei Yang; Rong Yang; Dongxia Shi; Guangyu Zhang
Journal: Natl Sci Rev Date: 2022-04-21 Impact factor: 23.178

Review 10. Electroanalytical overview: utilising micro- and nano-dimensional sized materials in electrochemical-based biosensing platforms.

Authors: Robert D Crapnell; Craig E Banks
Journal: Mikrochim Acta Date: 2021-07-22 Impact factor: 5.833

Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition.

1. Activation of nitrogen species mixed with Ar and H₂S plasma for directly N-doped TMD films synthesis.

Review 2. MoS₂ as a Co-Catalyst for Photocatalytic Hydrogen Production: A Mini Review.

3. Investigating the Effect of Steric Hindrance within CdS Single-Source Precursors on the Material Properties of AACVD and Spin-Coat-Deposited CdS Thin Films.

4. Booming Development of Group IV-VI Semiconductors: Fresh Blood of 2D Family.

5. Growth of Multiorientated Polycrystalline MoS₂ Using Plasma-Enhanced Chemical Vapor Deposition for Efficient Hydrogen Evolution Reactions.

6. Layer-by-layer epitaxy of multi-layer MoS₂ wafers.

7. Large area few-layer TMD film growths and their applications.

8. A sensitive electrochemical sensor for in vitro detection of parathyroid hormone based on a MoS₂-graphene composite.

9. Feasible Route for a Large Area Few-Layer MoS₂ with Magnetron Sputtering.

Review 10. Electroanalytical overview: utilising micro- and nano-dimensional sized materials in electrochemical-based biosensing platforms.

Review 2. MoS2 as a Co-Catalyst for Photocatalytic Hydrogen Production: A Mini Review.

Review 10. Electroanalytical overview: utilising micro- and nano-dimensional sized materials in electrochemical-based biosensing platforms.

Review 2. MoS₂ as a Co-Catalyst for Photocatalytic Hydrogen Production: A Mini Review.