Nondestructive Speciation Depth Profiling of Complex TiOx Nanolayer Structures by Grazing Incidence X-ray Fluorescence Analysis and Near Edge X-ray Absorption Fine Structure Spectroscopy.

An important challenge of modern material science is the depth-sensitive and nondestructive analysis of the chemical binding state of complex structures consisting of multiple thin layers. In general, the correlation of the material functionality and underlying chemical and physical properties is the key question in view of directed device development, performance, and quality control. It has been shown that the combined method grazing incidence X-ray fluorescence analysis (GIXRF) and near edge X-ray absorption fine structure spectroscopy (NEXAFS) can significantly contribute to the nondestructive chemical analysis of buried thin films and interface structures regarding chemical speciation. Recently, we have enhanced the method to allow for a depth-resolved analysis of multilayered nanoscaled thin film structures. By means of appropriate model systems, the methodology has been developed and successfully validated. The model systems basically consist of a carbon cap layer, two titanium layers differing in their oxidation states and separated by a thin carbon layer, and a silicon substrate covered with molybdenum and a carbon layer. A differential approach has been developed to derive the chemical species of each of the titanium layers.