Literature DB >> 26076267

Photonic-crystal waveguide structure by pattern-integrated interference lithography.

Matthieu C R Leibovici, Thomas K Gaylord.   

Abstract

The pattern-integrated interference lithography (PIIL) technique combines multi-beam interference lithography (MBIL) and imaging to produce functional periodic-lattice-based microstructures in a rapid single-exposure step. A photonic-crystal waveguide structure with sub-micron resolution is designed, fabricated by PIIL, and characterized. Scanning electron and atomic force microscope images are found to be in good qualitative agreement with three-dimensional simulations of the developed photoresist.

Year:  2015        PMID： 26076267     DOI： 10.1364/OL.40.002806

Source DB:  PubMed          Journal:  Opt Lett        ISSN： 0146-9592            Impact factor:   3.776


  3 in total

1.  Realization of III-V Semiconductor Periodic Nanostructures by Laser Direct Writing Technique.

Authors:  Yuan-Qing Huang; Rong Huang; Qing-Lu Liu; Chang-Cheng Zheng; Ji-Qiang Ning; Yong Peng; Zi-Yang Zhang
Journal:  Nanoscale Res Lett       Date:  2017-01-05       Impact factor: 4.703

2.  One-step volumetric additive manufacturing of complex polymer structures.

Authors:  Maxim Shusteff; Allison E M Browar; Brett E Kelly; Johannes Henriksson; Todd H Weisgraber; Robert M Panas; Nicholas X Fang; Christopher M Spadaccini
Journal:  Sci Adv       Date:  2017-12-08       Impact factor: 14.136

3.  Holographic Fabrication of Designed Functional Defect Lines in Photonic Crystal Lattice Using a Spatial Light Modulator.

Authors:  Jeffrey Lutkenhaus; David Lowell; David George; Hualiang Zhang; Yuankun Lin
Journal:  Micromachines (Basel)       Date:  2016-04-01       Impact factor: 2.891
  3 in total

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