Silicon hybrid demultiplexer with 64 channels for wavelength/mode-division multiplexed on-chip optical interconnects.

A monolithically integrated 64-channel hybrid demultiplexer on silicon is demonstrated experimentally to enable wavelength-division-multiplexing and mode-division-multiplexing simultaneously for realizing an ultra-large capacity optical-interconnect link. The present hybrid demultiplexer consists of a four-channel mode multiplexer realized with three cascaded asymmetrical directional-couplers and four identical arrayed-waveguide gratings (AWGs) with 16 channels. For the fabricated hybrid multiplexer, the excess loss and the crosstalk are about -7 and -10  dB, respectively. Better performances can be achieved by minimizing the imperfections (particularly in AWGs) in the fabrication processes. The present hybrid demultiplexer is scalable to have more channels by utilizing more wavelengths, modes, and polarizations.