Functionalized silicon nanoparticles from reactive cavitation erosion of silicon wafers.

A new sonochemical process for the top-down production of silicon nanoparticles (<1 nm) with surface functional groups is described. The procedure involves a combination of acoustic cavitation erosion of a single-crystalline silicon surface coupled with simultaneous reaction with a reactive organic compound such as 1-hexyne. The sonochemical formation of the photoluminescent silicon nanoparticles by reactive cavitation erosion can be easily up-scaled.