| Literature DB >> 25430153 |
Thanh Hung Dinh1, Yuhei Suzuki1, Ryoichi Hirose2, Hiroyuki Hara1, Hayato Ohashi3, Bowen Li4, Padraig Dunne4, Gerry O'Sullivan4, Atsushi Sunahara5, Takeshi Higashiguchi1.
Abstract
We report on production of volume-limited dot targets based on electron beam lithographic and sputtering technologies for use in efficient high brightness extreme ultraviolet microplasma sources. We successfully produced cylindrical tin (Sn) targets with diameters of 10, 15, and 20 μm and a height of 150 nm. The calculated spectrum around 13.5 nm was in good agreement with that obtained experimentally.Entities:
Year: 2014 PMID： 25430153 DOI： 10.1063/1.4901934
Source DB: PubMed Journal: Rev Sci Instrum ISSN： 0034-6748 Impact factor: 1.523