Three-dimensional microfabrication using local electrophoresis deposition and a laser trapping technique.

We describe a novel fabrication method of three-dimensional (3D) microstructures using local electrophoresis deposition together with laser trapping. A liquid cell consisting of two-faced conductive substrates was filled with a colloidal solution of Au nanoparticles. The nanoparticles were trapped by a laser spot and positioned on the bottom substrate, then deposited onto the surface by the application of electrical voltage between the two substrates. By moving the liquid cell downward while maintaining the deposition, 3D microstructures were successfully fabricated. The smallest diameter of the fabricated pillar was 500 nm, almost the same as that of the Airy disc. The Young's modulus of the fabricated structure was 1.5 GPa.