Accurate and simultaneous measurement of thickness and refractive index of thermally evaporated thin organic films by surface plasmon resonance spectroscopy.

We demonstrate that Surface Plasmon Resonance spectroscopy can be used for the accurate and simultaneous determination of the thickness and refractive index of transparent thin thermally deposited organic films. The experimental approach is based on a two-metal deposition or a two-thickness method. These methods have been applied to an encapsulated sample containing a thin film of commercial tris(8-hydroxyquinoline) (Alq3). The accuracy of the measurement depends on the control of the film deposition process and suggests the use of SPR spectroscopy as inexpensive and valuable metrology tool for small molecule organic thin films.