Plasmonic waveguide ring resonators with 4 nm air gap and λ0(2)/15,000 mode-area fabricated using photolithography.

Plasmonic air-gap disk resonators with 3.5 μm diameter and a 4 nm thick, 40 nm wide air gap for a mode area of only λ0(2)/15,000 were fabricated using photolithography only. The resonant modes were clearly identified using tapered fiber coupling method at the resonant wavelengths of 1280-1620 nm. We also demonstrate the advantage of the air-gap structure by using the resonators as label-free biosensors with a sensitivity of 1.6 THz/nm.