| Literature DB >> 25013304 |
Lin Liu1, Erkang Wang1, Xiaoyang Zhang1, Wenxuan Liang2, Xingde Li2, Huikai Xie1.
Abstract
A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ± 26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.Entities:
Keywords: 3D confocal imaging; 3D microendoscope; MEMS mirror; MEMS tunable lens; bimorph; electrothermal actuator; large scan range
Year: 2014 PMID: 25013304 PMCID: PMC4083856 DOI: 10.1016/j.sna.2013.09.035
Source DB: PubMed Journal: Sens Actuators A Phys ISSN: 0924-4247 Impact factor: 3.407