Induced charge electroosmosis micropumps using arrays of Janus micropillars.

We report on a microfluidic AC-driven electrokinetic pump that uses Induced Charge Electro-Osmosis (ICEO) to generate on-chip pressures. ICEO flows occur when a bulk electric field polarizes a metal object to induce double layer formation, then drives electroosmotic flow. A microfabricated array of metal-dielectric Janus micropillars breaks the symmetry of ICEO flow, so that an AC electric field applied across the array drives ICEO flow along the length of the pump. When pumping against an external load, a pressure gradient forms along the pump length. The design was analyzed theoretically with the reciprocal theorem. The analysis reveals a maximum pressure and flow rate that depend on the ICEO slip velocity and micropillar geometry. We then fabricate and test the pump, validating our design concept by demonstrating non-local pressure driven flow using local ICEO slip flows. We varied the voltage, frequency, and electrolyte composition, measuring pump pressures of 15-150 Pa. We use the pump to drive flows through a high-resistance microfluidic channel. We conclude by discussing optimization routes suggested by our theoretical analysis to enhance the pump pressure.