Resonant grating polarizers made with silicon nitride, titanium dioxide, and silicon: design, fabrication, and characterization.

We present the design, fabrication, and characterization of guided-mode resonance (GMR) linear polarizers that operate in the optical communications C-band near a wavelength of 1550 nm. We provide theoretical and experimental spectra using resonant elements fashioned in three material systems. In particular, we investigate silicon nitride resonant gratings and titanium dioxide gratings on glass substrates as well as silicon-on-quartz gratings. These materials exhibit very low losses and are capable of high diffraction efficiencies and extinction ratios; thus, high-power laser applications may be enabled. We present the methods applied to fabricate these GMR devices as well as means to ascertain their fabricated physical parameters. We quantify increased polarizer bandwidth with increased grating refractive-index modulation. The numerical results obtained with the fabricated-device parameters agree well with the experimental measured spectra.