| Literature DB >> 24692235 |
Nathan T Eigenfeld1, Jason M Gray, Joseph J Brown, George D Skidmore, Steven M George, Victor M Bright.
Abstract
Entities:
Keywords: NEMS; atomic layer deposition; microbolometer; nanofabrication; polymers
Year: 2014 PMID: 24692235 DOI: 10.1002/adma.201400410
Source DB: PubMed Journal: Adv Mater ISSN: 0935-9648 Impact factor: 30.849