| Literature DB >> 24689592 |
E Nazaretski1, X Huang1, H Yan1, K Lauer1, R Conley1, N Bouet1, J Zhou1, W Xu1, D Eom1, D Legnini2, R Harder2, C-H Lin3, Y-S Chen3, Y Hwu3, Y S Chu1.
Abstract
We have designed and constructed a dedicated instrument to perform ptychography measurements and characterization of multilayer Laue lenses nanofocusing optics. The design of the scanning microscope provides stability of components and minimal thermal drifts, requirements for nanometer scale spatial resolution measurements. We performed thorough laboratory characterization of the instrument in terms of resolution and thermal drifts with subsequent measurements at a synchrotron. We have successfully acquired and reconstructed ptychography data yielding 11 nm line focus.Year: 2014 PMID： 24689592 DOI： 10.1063/1.4868968
Source DB: PubMed Journal: Rev Sci Instrum ISSN： 0034-6748 Impact factor: 1.523