Growth model for laser-induced damage on the exit surface of fused silica under UV, ns laser irradiation.

We present a comprehensive statistical model which includes both the probability of growth and growth rate to describe the evolution of exit surface damage sites on fused silica optics over multiple laser shots spanning a wide range of fluences. We focus primarily on the parameterization of growth rate distributions versus site size and laser fluence using Weibull statistics and show how this model is consistent with established fracture mechanics concepts describing brittle materials. Key growth behaviors and prediction errors associated with the present model are also discussed.