| Literature DB >> 24663568 |
Mourad Idir, Konstantine Kaznatcheev, Guillaume Dovillaire, Jerome Legrand, Rakchanok Rungsawang.
Abstract
We present a 2D Slope measuring System based on a Stitching Shack Hartmann Optical Head (SSH-OH) aiming to perform high accuracy optical metrology for X-ray mirrors. This system was developed to perform high-accuracy automated metrology for extremely high quality optical components needed for synchrotrons or Free Electrons Lasers (FEL), EUV lithography and x-ray astronomy with slope error accuracy better than 50 nrad rms.Entities:
Year: 2014 PMID： 24663568 DOI： 10.1364/OE.22.002770
Source DB: PubMed Journal: Opt Express ISSN： 1094-4087 Impact factor: 3.894