| Literature DB >> 24216890 |
Yoon Ho Daniel Lee, Michael O Thompson, Michal Lipson.
Abstract
We demonstrate gigahertz electro-optic modulator fabricated on low temperature polysilicon using excimer laser annealing technique compatible with CMOS backend integration. Carrier injection modulation at 3 Gbps is achieved. These results open up an array of possibilities for silicon photonics including photonics on DRAM and on flexible substrates.Entities:
Year: 2013 PMID： 24216890 DOI： 10.1364/OE.21.026688
Source DB: PubMed Journal: Opt Express ISSN： 1094-4087 Impact factor: 3.894