Micro-fabrication of Piezo-composite materials on the flexible substrates.

In this study, we have presented micro-scaled flexible energy harvesters fabricated by the Micro-electromechanical systems (MEMS) process. The flexible energy harvesters were prepared by a pillar structure with a diameter size of 100-500 microm. We will describe a micro-pattern of fine scale ceramic structures utilizing an SU-8 negative photoresist by standard UV lithography. SU-8 processing was developed to implement low-stress SU-8 structures as permanent and functional material incorporated with silicon-on-insulator technologies. The micro-patterns of fine scale (Pb, Zr) TiO3 ceramics of the pillar shape were prepared by this MEMS method. We have studied the micro-pattern of fine scale PZT pillar structures through scanning electron microscope (SEM) analysis and several analysis methods.