| Literature DB >> 24123889 |
Abstract
Ultra-sharp metallic pyramids and wedges with tunable tip angles and 5-nm tip radii are replicated from oxidation-sharpened silicon templates with high throughput (80 million pyramids per wafer). Atomic layer deposition of Al2 O3 shells can protect these sharp pyramidal tips for subsequent usage in near-field imaging.Entities:
Keywords: atomic layer deposition; metallic pyramid; near-field optical microscopy; plasmonic nanofocusing; template stripping
Year: 2013 PMID： 24123889 DOI： 10.1002/smll.201301475
Source DB: PubMed Journal: Small ISSN： 1613-6810 Impact factor: 13.281