XUV coherent diffraction imaging in reflection geometry with low numerical aperture.

We present an experimental realization of coherent diffraction imaging in reflection geometry illuminating the sample with a laser driven high harmonic generation (HHG) based XUV source. After recording the diffraction pattern in reflection geometry, the data must be corrected before the image can be reconstructed with a hybrid-input-output (HIO) algorithm. In this paper we present a detailed investigation of sources of spoiling the reconstructed image due to the nonlinear momentum transfer, errors in estimating the angle of incidence on the sample, and distortions by placing the image off center in the computation grid. Finally we provide guidelines for the necessary parameters to realize a satisfactory reconstruction within a spatial resolution in the range of one micron for an imaging scheme with a numerical aperture NA < 0.03.