Sandwich structure of Pd doped nanostructure TiO2 film as O2 sensor.

In this paper, we investigated the sensing properties of sandwich structure of TiO2/Pd/TiO2 thin films at various operating temperatures and oxygen partial pressures. The nanostructure TiO2 thin films were prepared by the sol-gel method. Various thickness of Pd buried layer was deposited by magnetron sputtering of a pure Pd target. The films were characterized using X-ray diffraction analysis and SEM. It was found that TiO2/Pd/TiO2 thin films have the p-type behavior while the pure TiO2 thin film is n-type semiconductor materials. We found that the structure of TiO2/Pd/TiO2 thin films with 10 s sputtering Pd layer has a better stability at 240 °C.