| Literature DB >> 23976838 |
A Dhawan1, J F Muth, D N Leonard, M D Gerhold, J Gleeson, T Vo-Dinh, P E Russell.
Abstract
Year: 2008 PMID: 23976838 PMCID: PMC3748961 DOI: 10.1116/1.3013329
Source DB: PubMed Journal: J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom ISSN: 0734-2101 Impact factor: 2.427