| Literature DB >> 23963926 |
Jonathan P Singer1, Pao-Tai Lin, Steven E Kooi, Lionel C Kimerling, Jurgen Michel, Edwin L Thomas.
Abstract
A positive-tone 2D direct-write technique that can achieve sub-wavelength patterning by non-linear overlap effects in a conventional polymer system is described. The technique involves relatively inexpensive free-space optics, skips the usual development step, and promises the possibility of a lithographic method that is solvent-free.Entities:
Keywords: dewetting; direct write; pattern transfer; thermocapillary effect
Year: 2013 PMID: 23963926 DOI: 10.1002/adma.201302777
Source DB: PubMed Journal: Adv Mater ISSN: 0935-9648 Impact factor: 30.849