Amperometric electrochemical microsystem for a miniaturized protein biosensor array.

Protein-based bioelectrochemical interfaces offer great potential for rapid detection, continuous use, and miniaturized sensor arrays. This paper introduces a microsystem platform that enables multiple bioelectrochemical interfaces to be interrogated simultaneously by an onchip amperometric readout system. A post-complementary metal-oxide semiconductor (CMOS) fabrication procedure is described that permits the formation of planar electrode arrays and self assembly of biosensor interfaces on the electrodes. The onchip, 0.5-mum CMOS readout electronics include a compact potentiostat that supports a very broad range of input currents-6 pA to 10 muA-to accommodate diverse biosensor interfaces. The 2.3 times 2.2-mm chip operates from a 5-V supply at 0.6 mA. A prototype electrochemical sensor platform, including an onchip potentiostat and miniaturized biosensor array, was characterized by using cyclic voltammetry. The linear relationship between the oxidization peak values and the concentrations of target analytes in the solution verifies functionality of the system and demonstrates the potential for future implementations of this platform in high sensitivity, low cost, and onchip protein-based sensor arrays.