Surface-sensitive conductivity measurement using a micro multi-point probe approach.

An instrument for microscale electrical transport measurements in ultra-high vacuum is presented. The setup is constructed around collinear lithographically-created multi-point probes with a contact spacing down to 500 nm. Most commonly, twelve-point probes are used. These probes are approached to the surface via piezoelectric positioners. Standard four-point resistance measurements can be performed using any combination of contacts out of the twelve available. Current/voltage measurements are taken semi-automatically for a variety of the possible contact configurations, effectively emulating measurements with an equidistant four-point probe for a wide range of contact spacings. In this way, it is possible to distinguish between bulk-like and surface-like conduction. The paper describes the design of the instrument and the approach to data and error analysis. Application examples are given for epitaxial graphene on SiC and degenerately doped Bi₂Se₃.