| Literature DB >> 23427089 |
Wooyoung Shim1, Keith A Brown, Xiaozhu Zhou, Boris Rasin, Xing Liao, Abrin L Schmucker, Chad A Mirkin.
Abstract
Traditionally, scanning probe lithography tools are limited in resolution by the radius of curvature of the tip used. Herein, an approach is described for patterning the ridge of piled-up polymer that naturally occurs when a scanning probe is pressed against a soft surface. The use of this phenomenon to transfer patterns to hard materials with 20 nm resolution is demonstrated.Entities:
Keywords: atomic force microscopy; nanofabrication; nanolithography; polymers; scanning probe microscopy
Mesh:
Year: 2013 PMID: 23427089 PMCID: PMC3773253 DOI: 10.1002/smll.201203014
Source DB: PubMed Journal: Small ISSN: 1613-6810 Impact factor: 13.281