Practical aspects of single-pass scan Kelvin probe force microscopy.

The single-pass scan Kelvin probe force microscopy (KPFM) in ambient condition has a few advantages over the dual-pass lift-up scan KPFM. For example, its spatial resolution is expected to be higher; and its topographical errors caused by electrostatic forces are minimized because electrostatic forces are actively suppressed during the simultaneous topographical and KPFM measurement. Because single-pass scan KPFM in ambient condition is relatively new, it received little attention in the literature so far. In this article, we discuss several major practical aspects of single-pass scan KPFM especially in ambient condition. First, we define the resolution using a point spread function. With this definition, we analyze the relation between the resolution and the scanning parameters such as tip apex radius and tip-surface distance. We further study the accuracy of KPFM based on the point spread function. Then, we analyze the sensitivity of KPFM under different operation modes. Finally, we investigate the crosstalk between the topographical image and the surface potential image and demonstrate the practical ways to minimize the crosstalk. These discussions not only help us to understand the single-pass scan KPFM but also provide practical guidance in using single-pass scan KPFM.