Single beam grating coupled interferometry: high resolution miniaturized label-free sensor for plate based parallel screening.

Grating Coupled Interferometry (GCI) using high quality waveguides with two incoupling and one outcoupling grating areas is introduced to increase and precisely control the sensing length of the device; and to make the sensor design suitable for plate-based multiplexing. In contrast to other interferometric arrangements, the sensor chips are interrogated with a single expanded laser beam illuminating both incoupling gratings simultaneously. In order to obtain the interference signal, only half of the beam is phase modulated using a laterally divided two-cell liquid crystal modulator. The developed highly symmetrical arrangement of the interferometric arms increases the stability and at the same time offers straightforward integration of parallel sensing channels. The device characteristics are demonstrated for both TE and TM polarized modes.