High dynamic range microscope infrared imaging of silicon nanophotonic devices.

A noninvasive diagnostic technique based on wavelength-resolved and magnified infrared images of weakly scattered light from a silicon photonic device may be useful to infer component characteristics, such as waveguide-resonator coupling, loss, quality factor, etc., at multiple locations, without the constraint of input/output couplers. Here, we demonstrate the benefit of high dynamic range microscope imaging for a silicon coupled microresonator device.