Rapid preparation of electron beam induced deposition Co magnetic force microscopy tips with 10 nm spatial resolution.

Magnetic force microscope Co spike tips with lateral magnetic resolution of 10 nm have been prepared. The Co spikes are grown by electron beam induced deposition of Co from Co(2)(CO)(8) gas precursor. The high resolution Co spikes are fabricated at the spot of a tightly focused electron beam on the tip of commercial atomic force microscope cantilevers. Qualitative investigations indicate that a spike grown on a planar base of Co improves the signal to noise.