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Literature DB >> 22495881

AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators.

Chih-Ming Lin¹, Yung-Yu Chen, Valery V Felmetsger, Debbie G Senesky, Albert P Pisano.

Abstract

An AlN/3C-SiC composite layer enables the third-order quasi-symmetric (QS(3)) Lamb wave mode with a high quality factor (Q) characteristic and an ultra-high phase velocity up to 32395 ms(-1). A Lamb wave resonator utilizing the QS(3) mode exhibits a low motional impedance of 91 Ω and a high Q of 5510 at a series resonance frequency (f(s)) of 2.92 GHz, resulting in the highest f(s)·Q product of 1.61 × 10(13) Hz among the suspended piezoelectric thin film resonators reported to date.

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Year: 2012 PMID： 22495881 DOI： 10.1002/adma.201104842

Source DB: PubMed Journal: Adv Mater ISSN： 0935-9648 Impact factor: 30.849

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Cited

14 in total

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Authors: Dung-Sheng Tsai; Wei-Cheng Lien; Der-Hsien Lien; Kuan-Ming Chen; Meng-Lin Tsai; Debbie G Senesky; Yueh-Chung Yu; Albert P Pisano; Jr-Hau He
Journal: Sci Rep Date: 2013 Impact factor: 4.379

2. Modeling and Experimental Analysis on the Temperature Response of AlN-Film Based SAWRs.

Authors: Shuo Chen; Zheng You
Journal: Sensors (Basel) Date: 2016-07-30 Impact factor: 3.576

3. SAW Humidity Sensor Sensitivity Enhancement via Electrospraying of Silver Nanowires.

Authors: Farid Sayar Irani; Bahadir Tunaboylu
Journal: Sensors (Basel) Date: 2016-11-30 Impact factor: 3.576

4. Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure.

Authors: Cristina Besleaga; Viorel Dumitru; Liliana Marinela Trinca; Adrian-Claudiu Popa; Constantin-Catalin Negrila; Łukasz Kołodziejczyk; Catalin-Romeo Luculescu; Gabriela-Cristina Ionescu; Razvan-George Ripeanu; Alina Vladescu; George E Stan
Journal: Nanomaterials (Basel) Date: 2017-11-17 Impact factor: 5.076

5. Amorphous SiC/c-ZnO-Based Quasi-Lamb Mode Sensor for Liquid Environments.

Authors: Cinzia Caliendo; Muhammad Hamidullah; Farouk Laidoudi
Journal: Sensors (Basel) Date: 2017-05-25 Impact factor: 3.576

6. Micro-Fabricated Resonator Based on Inscribing a Meandered-Line Coupling Capacitor in an Air-Bridged Circular Spiral Inductor.

Authors: Eun Seong Kim; Nam Young Kim
Journal: Micromachines (Basel) Date: 2018-06-12 Impact factor: 2.891

AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators.

1. Solar-blind photodetectors for harsh electronics.

2. Modeling and Experimental Analysis on the Temperature Response of AlN-Film Based SAWRs.

3. SAW Humidity Sensor Sensitivity Enhancement via Electrospraying of Silver Nanowires.

4. Mechanical, Corrosion and Biological Properties of Room-Temperature Sputtered Aluminum Nitride Films with Dissimilar Nanostructure.

5. Amorphous SiC/c-ZnO-Based Quasi-Lamb Mode Sensor for Liquid Environments.

6. Micro-Fabricated Resonator Based on Inscribing a Meandered-Line Coupling Capacitor in an Air-Bridged Circular Spiral Inductor.

7. High-frequency and high-quality silicon carbide optomechanical microresonators.

8. The Characterization of Surface Acoustic Wave Devices Based on AlN-Metal Structures.

9. Prediction of the Strain Response of Poly-AlN/(100)Si Surface Acoustic Wave Resonator and Experimental Analysis.

10. Surface Acoustic Wave Hydrogen Sensors Based on Nanostructured Pd/WO₃ Bilayers.