Literature DB >> 22299954

Cutoff probe using Fourier analysis for electron density measurement.

Byung-Keun Na1, Kwang-Ho You, Dae-Woong Kim, Hong-Young Chang, Shin-Jae You, Jung-Hyung Kim.   

Abstract

This paper proposes a new method for cutoff probe using a nanosecond impulse generator and an oscilloscope, instead of a network analyzer. The nanosecond impulse generator supplies a radiating signal of broadband frequency spectrum simultaneously without frequency sweeping, while frequency sweeping method is used by a network analyzer in a previous method. The transmission spectrum (S21) was obtained through a Fourier analysis of the transmitted impulse signal detected by the oscilloscope and was used to measure the electron density. The results showed that the transmission frequency spectrum and the electron density obtained with a new method are very close to those obtained with a previous method using a network analyzer. And also, only 15 ns long signal was necessary for spectrum reconstruction. These results were also compared to the Langmuir probe's measurements with satisfactory results. This method is expected to provide not only fast measurement of absolute electron density, but also function in other diagnostic situations where a network analyzer would be used (a hairpin probe and an impedance probe) by replacing the network analyzer with a nanosecond impulse generator and an oscilloscope.

Year:  2012        PMID: 22299954     DOI: 10.1063/1.3680103

Source DB:  PubMed          Journal:  Rev Sci Instrum        ISSN: 0034-6748            Impact factor:   1.523


  1 in total

1.  Crossing Frequency Method Applicable to Intermediate Pressure Plasma Diagnostics Using the Cutoff Probe.

Authors:  Si-Jun Kim; Jang-Jae Lee; Young-Seok Lee; Chul-Hee Cho; Shin-Jae You
Journal:  Sensors (Basel)       Date:  2022-02-08       Impact factor: 3.576

  1 in total

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