Literature DB >> 22286331

A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers.

Frederik Goethals1, Mikhail R Baklanov, Ivan Ciofi, Christophe Detavernier, Pascal Van der Voort, Isabel Van Driessche.   

Abstract

A new strategy to seal mesoporous low-k thin films with a pore size of 3 nm has been developed. This is achieved by spin-coating of a self-assembled carbon-bridged organosilica layer followed by a grafting with hexamethyl disilazane. This journal is © The Royal Society of Chemistry 2012

Entities:  

Year:  2012        PMID： 22286331     DOI： 10.1039/c2cc18017k

Source DB:  PubMed          Journal:  Chem Commun (Camb)        ISSN： 1359-7345            Impact factor:   6.222


  3 in total

1.  Periodic Mesoporous Organosilica Functionalized with Sulfonic Acid Groups as Acid Catalyst for Glycerol Acetylation.

Authors:  Els De Canck; Inmaculada Dosuna-Rodríguez; Eric M Gaigneaux; Pascal Van Der Voort
Journal:  Materials (Basel)       Date:  2013-08-16       Impact factor: 3.623

2.  Pore Narrowing of Mesoporous Silica Materials.

Authors:  Frederik Goethals; Elisabeth Levrau; Els De Canck; Mikhail R Baklanov; Christophe Detavernier; Isabel Van Driessche; Pascal Van Der Voort
Journal:  Materials (Basel)       Date:  2013-02-20       Impact factor: 3.623

3.  Pyromellitic diamide-diacid bridged mesoporous organosilica nanospheres with controllable morphologies: a novel PMO for the facile and expeditious synthesis of imidazole derivatives.

Authors:  Ehsan Valiey; Mohammad G Dekamin
Journal:  Nanoscale Adv       Date:  2021-11-04
  3 in total

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