Deterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities.

Photonic crystal nanobeam cavities are versatile platforms of interest for optical communications, optomechanics, optofluidics, cavity QED, etc. In a previous work [Appl. Phys. Lett. 96, 203102 (2010)], we proposed a deterministic method to achieve ultrahigh Q cavities. This follow-up work provides systematic analysis and verifications of the deterministic design recipe and further extends the discussion to air-mode cavities. We demonstrate designs of dielectric-mode and air-mode cavities with Q > 10⁹, as well as dielectric-mode nanobeam cavities with both ultrahigh-Q (> 10⁷) and ultrahigh on-resonance transmissions (T > 95%).