X-ray reflection tomography: a new tool for surface imaging.

We report here a novel technique of surface imaging by X-ray reflection tomography utilizing an ordinary laboratory X-ray source. The technique utilizes the line projection, at different rotation angles, of the reflected beam from a highly reflecting patterned sample at grazing incidence. Filtered back-projection algorithm is applied to the line projection data to reconstruct an image of the pattern on the sample surface. Spatial resolution currently obtained is ~1.6 mm. Nonetheless, we have achieved high correlation between the original image and the reconstructed image. This work is the first step in future efforts of nondestructive X-ray imaging for buried surfaces and interfaces.