Literature DB >> 21859588

Correlation between temperature coefficient of elasticity and fourier transform infrared spectra of silicon dioxide films for surface acoustic wave devices.

Satoru Matsuda, Motoaki Hara, Michio Miura, Takashi Matsuda, Masanori Ueda, Yoshio Satoh, Ken-Ya Hashimoto.   

Abstract

We investigated the correlation between the temperature coefficient of elasticity (TCE) and Fourier transform infrared (FT-IR) absorption spectra of SiO(2) for SAW devices. The measurement indicated that the TCE is strongly correlated with peak frequencies; that is, with the fractional change of the Si-O-Si bond angle with temperature.

Entities:  

Year:  2011        PMID: 21859588     DOI: 10.1109/TUFFC.2011.1996

Source DB:  PubMed          Journal:  IEEE Trans Ultrason Ferroelectr Freq Control        ISSN: 0885-3010            Impact factor:   2.725


  1 in total

Review 1.  Development and Application of SAW Filter.

Authors:  Pu Chen; Guangxi Li; Zhiyuan Zhu
Journal:  Micromachines (Basel)       Date:  2022-04-20       Impact factor: 3.523

  1 in total

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