1.53 µm photo- and electroluminescence from Er(3+) in erbium silicate.

Si-rich silicon oxide (SRO)/Er-Si-O/SRO multilayers were prepared on p-Si substrates using magnetron sputtering. X-ray diffraction measurements indicate that a mixture of silicates Er(2)Si(2)O(7) and Er(2)SiO(5) was formed after the multilayers were annealed at 1000 and 1150 °C. Strong Er(3+) 1.53 µm photoluminescence (PL) at room temperature has been observed from these multilayers and the full width at half-maximum of the 1.53 µm peak is less than 1.8 nm for the multilayers annealed at 1150 °C. Er(3+) 1.53 µm electroluminescence has been observed from erbium silicate films for the first time.