| Literature DB >> 21766356 |
Suenne Kim1, Yaser Bastani, Haidong Lu, William P King, Seth Marder, Kenneth H Sandhage, Alexei Gruverman, Elisa Riedo, Nazanin Bassiri-Gharb.
Abstract
A complementary metal-oxide-semico-nductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52 Ti0.48)O3 and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width ≥30 nm, spheres with diameter ≥10 nm, and densities up to 213 Gb in(-2) are produced.Entities:
Keywords: ferroelectric materials; nanomanufacturing; piezoelectric materials; thermochemical nanolithography
Year: 2011 PMID： 21766356 DOI： 10.1002/adma.201101991
Source DB: PubMed Journal: Adv Mater ISSN： 0935-9648 Impact factor: 30.849