Statistical studies of photonic heterostructure nanocavities with an average Q factor of three million.

We have measured the quality (Q) factors and resonant wavelengths for 80 photonic crystal nanocavities with the same heterostructure. In this statistical evaluation, the Q factors varied according to a normal distribution centered at 3 million and ranging between 2.3 million and 3.9 million. The resonant wavelengths also fluctuated but with a standard deviation of only 0.33 nm. Such a high average Q factor and highly controlled resonant wavelength will be important for the development of advanced applications of photonic crystal nanocavities. Comparing the experimental values with calculated values suggests that factors other than structural variations of air holes, which decrease the Q factor, are indeed present in the fabricated nanocavities.