High quality factor in a two-dimensional photonic crystal cavity on silicon-on-insulator.

We propose a design for high quality factor two-dimensional (2D) photonic crystal cavities on silicon-on-insulator (SOI). A quality factor of up to 1.2×10(7) with a modal volume of 2.35(λ/n)(3) is simulated. A very high quality factor of 200,000 is experimentally demonstrated for a 2D cavity fabricated on SOI.