Dynamic generation of Debye diffraction-limited multifocal arrays for direct laser printing nanofabrication.

We propose a Debye-theory-based iterative method to produce accurate phase patterns for generating highly uniform diffraction-limited multifocal arrays with a high-NA objective. It is shown that by using the Debye method, the uniformity of the diffraction-limited focal arrays can reach 99%, owing to the critical consideration of the depolarization effect associated with high-NA objectives. The generated phase patterns are implemented in fast dynamic laser printing nanofabrication for the generation of individually controlled high-quality microvoid arrays in a solid polymer material by a single exposure of a femtosecond laser beam. As a result of the high-quality multifocal arrays, functional three-dimensional photonic crystals possessing multiple stopgaps with suppression up to 80% in transmission spectra are demonstrated.