Subpicometer length measurement using heterodyne laser interferometry and all-digital rf phase meters.

We present an all-digital phase meter for precision length measurements using heterodyne laser interferometry. Our phase meter has a phase sensitivity of 3 μrad/√Hz at signal frequencies of 1 Hz and above. We test the performance of our phase meter in an optical heterodyne interferometric configuration, using an active Sagnac interferometer test bed that is flexible and low noise. We demonstrate more than 70 dB of laser frequency noise suppression to achieve an optical phase sensitivity of 5 μrad/√Hz and a corresponding displacement sensitivity of 0.5 pm/√Hz at signal frequencies above 10 Hz. In addition, we demonstrate the ability of our phase meter to follow full fringe signals accurately at 100 Hz and to track large signal excursions in excess of 10(5) fringes without cycle slipping. Finally, we demonstrate a cyclic error of ≤1 pm/√Hz, above 10 Hz.