Literature DB >> 21161988

Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering.

Morito Akiyama1, Toshihiro Kamohara, Kazuhiko Kano, Akihiko Teshigahara, Yukihiro Takeuchi, Nobuaki Kawahara.   

Abstract

Entities:  

Year:  2009        PMID： 21161988     DOI： 10.1002/adma.200802611

Source DB:  PubMed          Journal:  Adv Mater        ISSN： 0935-9648            Impact factor:   30.849


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  20 in total

1.  Polarity Control of an All-Sputtered Epitaxial GaN/AlN/Al Film on a Si(111) Substrate by Intermediate Oxidization.

Authors:  Takahiro Nagata; Yuya Suemoto; Yoshihiro Ueoka; Masami Mesuda; Liwen Sang; Toyohiro Chikyow
Journal:  ACS Omega       Date:  2022-05-31

2.  Effect of Substrate-RF on Sub-200 nm Al0.7Sc0.3N Thin Films.

Authors:  Michele Pirro; Xuanyi Zhao; Bernard Herrera; Pietro Simeoni; Matteo Rinaldi
Journal:  Micromachines (Basel)       Date:  2022-05-31       Impact factor: 3.523

3.  Circular test structure for the determination of piezoelectric constants of Sc x Al1-x N thin films applying Laser Doppler Vibrometry and FEM simulations.

Authors:  P M Mayrhofer; H Euchner; A Bittner; U Schmid
Journal:  Sens Actuators A Phys       Date:  2015-02-01       Impact factor: 3.407

4.  Transition-metal-nitride-based thin films as novel energy harvesting materials.

Authors:  Per Eklund; Sit Kerdsongpanya; Björn Alling
Journal:  J Mater Chem C Mater       Date:  2016-02-19       Impact factor: 7.393

5.  Smelting of Scandium by Microwave Irradiation.

Authors:  Satoshi Fujii; Shuntaro Tsubaki; Naomi Inazu; Eiichi Suzuki; Yuji Wada
Journal:  Materials (Basel)       Date:  2017-09-27       Impact factor: 3.623

6.  Tuning piezoelectric properties through epitaxy of La2Ti2O7 and related thin films.

Authors:  Tiffany C Kaspar; Seungbum Hong; Mark E Bowden; Tamas Varga; Pengfei Yan; Chongmin Wang; Steven R Spurgeon; Ryan B Comes; Pradeep Ramuhalli; Charles H Henager
Journal:  Sci Rep       Date:  2018-02-14       Impact factor: 4.379

Review 7.  Materials, Design, and Characteristics of Bulk Acoustic Wave Resonator: A Review.

Authors:  Yan Liu; Yao Cai; Yi Zhang; Alexander Tovstopyat; Sheng Liu; Chengliang Sun
Journal:  Micromachines (Basel)       Date:  2020-06-28       Impact factor: 2.891

8.  Polarity Inversion of Aluminum Nitride Thin Films by using Si and MgSi Dopants.

Authors:  Sri Ayu Anggraini; Masato Uehara; Kenji Hirata; Hiroshi Yamada; Morito Akiyama
Journal:  Sci Rep       Date:  2020-03-09       Impact factor: 4.379

Review 9.  Ferroelectric Polymers Exhibiting Negative Longitudinal Piezoelectric Coefficient: Progress and Prospects.

Authors:  Yang Liu; Qing Wang
Journal:  Adv Sci (Weinh)       Date:  2020-02-05       Impact factor: 16.806

10.  Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator.

Authors:  Chao Gao; Yang Zou; Jie Zhou; Yan Liu; Wenjuan Liu; Yao Cai; Chengliang Sun
Journal:  Micromachines (Basel)       Date:  2022-01-08       Impact factor: 2.891
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