Compact wavelength-insensitive fabrication-tolerant silicon-on-insulator beam splitter.

A star coupler-based beam splitter for rib waveguides is reported. A design method is presented and applied in the case of silicon-on-insulator rib waveguides. Experimental results are in good agreement with simulations. Excess loss lower than 1 dB is experimentally obtained for star coupler lengths from 0.5 to 1 μm. Output balance is better than 1 dB, which is the measurement accuracy, and broadband transmission is obtained over 90 nm.