| Literature DB >> 20856566 |
N M Ceglio, A M Hawryluk, G E Sommargren.
Abstract
We present a protocol for the design of an illumination system (front end) for a soft-x-ray projection lithography tool. The protocol is illustrated by specific front-end designs. The most complete design analysis is for a laser-driven system. Other drivers; undulator, synchrotron orbital radiation, and plasma discharge, are also discussed.Entities:
Year: 1993 PMID： 20856566 DOI： 10.1364/AO.32.007050
Source DB: PubMed Journal: Appl Opt ISSN： 1559-128X Impact factor: 1.980