System of optical noncontact microtopography.

In this paper we describe a method of noncontact optical microtopography based on discrete triangulation. We show that a light beam with an oblique incidence on a surface can be used to assess the distance of the latter to a reference plane if the bright spot produced on the surface is imaged onto an array of detectors that tracks its lateral displacement. The light beam is swept over the surface so that large areas can be scanned. The authors have used their system with success for the topographic inspection of several surfaces, e.g., thin copper and silver films, polyethylene rough films and molds, graphite, machined metallic parts, and fabrics.