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Literature DB >> 20697574

E-beam lithography for micro-nanofabrication.

Abstract

Electron beam lithography (EBL) is one of the tools of choice for writing micro- and nanostructures on a wide variety of materials. This is largely due to the fact that modern EBL machines are capable of writing nanometer-sized structures on areas up to mm(2). The aim of this contribution is to give technical and practical backgrounds in this extremely flexible nanofabrication technique.

Year: 2010 PMID： 20697574 PMCID： PMC2917861 DOI： 10.1063/1.3437589

Source DB: PubMed Journal: Biomicrofluidics ISSN： 1932-1058 Impact factor: 2.800

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Cited

21 in total

1. Fabrication of spatially confined complex oxides.

Authors: Hangwen Guo; Thomas Z Ward
Journal: J Vis Exp Date: 2013-07-01 Impact factor: 1.355

Review 2. High bandwidth approaches in nanopore and ion channel recordings - A tutorial review.

Authors: Andreas J W Hartel; Siddharth Shekar; Peijie Ong; Indra Schroeder; Gerhard Thiel; Kenneth L Shepard
Journal: Anal Chim Acta Date: 2019-01-25 Impact factor: 6.558

3. Tandem array of nanoelectronic readers embedded coplanar to a fluidic nanochannel for correlated single biopolymer analysis.

Authors: Leonardo Lesser-Rojas; K K Sriram; Kuo-Tang Liao; Shui-Chin Lai; Pai-Chia Kuo; Ming-Lee Chu; Chia-Fu Chou
Journal: Biomicrofluidics Date: 2014-01-10 Impact factor: 2.800

E-beam lithography for micro-nanofabrication.

1. Fabrication of spatially confined complex oxides.

Review 2. High bandwidth approaches in nanopore and ion channel recordings - A tutorial review.

3. Tandem array of nanoelectronic readers embedded coplanar to a fluidic nanochannel for correlated single biopolymer analysis.

4. High-Throughput Universal DNA Curtain Arrays for Single-Molecule Fluorescence Imaging.

Review 5. Rise of cyborg microrobot: different story for different configuration.

6. A general lithography-free method of microscale/nanoscale fabrication and patterning on Si and Ge surfaces.

7. Low-cost photolithographic fabrication of nanowires and microfilters for advanced bioassay devices.

Review 8. Characterization of immune cell migration using microfabrication.

9. Electron beam fabrication of a microfluidic device for studying submicron-scale bacteria.

10. Electrolithography--A New and Versatile Process for Nano Patterning.