| Literature DB >> 20389595 |
Nicolás Sherwood-Droz1, Alexander Gondarenko, Michal Lipson.
Abstract
We demonstrate a bulk silicon alternative to the conventional silicon-on-insulator photonics platform, using common CMOS process-based Si(3)N(4) masking and oxidation techniques. We show waveguide losses as low as 2.92 dB/cm with a technique that can be implemented on the front-end of a typical CMOS fabrication line.Entities:
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Year: 2010 PMID： 20389595 DOI： 10.1364/OE.18.005785
Source DB: PubMed Journal: Opt Express ISSN： 1094-4087 Impact factor: 3.894