Study of sensitivity and noise in the piezoelectric self-sensing and self-actuating cantilever with an integrated Wheatstone bridge circuit.

A detection method using a self-sensing cantilever is more desirable than other detection methods (optical fiber and laser beam bounce detection) that are bulky and require alignment. The advantage of the self-sensing cantilever is its simplicity, particularly its simple structure. It can be used for the construction of an atomic force microscopy system with a vacuum, fluids, and a low temperature chamber. Additionally, the self-actuating cantilever can be used for a high speed scanning system because the bandwidth is larger than the bulk scanner. Frequently, ZnO film has been used as an actuator in a self-actuating cantilever. In this paper, we studied the characteristics of the self-sensing and self-actuating cantilever with an integrated Wheatstone bridge circuit substituting the ZnO film with a lead zirconate titanate (PZT) film as the actuator. We can reduce the leakage current (to less than 10(-4) A/cm(2)) in the PZT cantilever and improve sensor sensitivity through a reduction of noise level from the external sensor circuit using the Wheatstone bridge circuit embedded into the cantilever. The self-sensing and actuating cantilever with an integrated Wheatstone bridge circuit was compared with a commercial self-sensing cantilever or self-sensing and actuating cantilever without an integrated Wheatstone bridge circuit. The measurement results have shown that sensing the signal to noise level and the minimum detectable deflection improved to 4.78 mV and 1.18 nm, respectively. We believe that this cantilever allows for easier system integration and miniaturization, provides better controllability and higher scan speeds, and offers the potential for full automation.