Literature DB >> 20134844

Evaluation of large aberrations using a lateral-shear interferometer having variable shear.

M P Rimmer, J C Wyant.   

Abstract

A variable shear lateral shearing interferometer consisting of two holographically produced crossed diffraction gratings is used to test nonrotationally symmetric wavefronts having aberrations greater than 100 wavelengths and slope variations of more than 400 wavelengths/diameter. Comparisons are made with results of Twyman-Green interferometric tests for wavefront aberrations of up to thirty wavelengths. The results indicate that small wavefront aberrations can be measured as accurately with the lateral-shear interferometer as with the Twyman-Green interferometer and that aberrations that cannot be measured at all with a Twyman-Green interferometer can be measured to about 1% accuracy or better.

Year:  1975        PMID: 20134844     DOI: 10.1364/AO.14.000142

Source DB:  PubMed          Journal:  Appl Opt        ISSN: 1559-128X            Impact factor:   1.980


  1 in total

1.  Extreme ultraviolet microscope characterization using photomask surface roughness.

Authors:  Gautam Gunjala; Antoine Wojdyla; Stuart Sherwin; Aamod Shanker; Markus P Benk; Kenneth A Goldberg; Patrick P Naulleau; Laura Waller
Journal:  Sci Rep       Date:  2020-07-15       Impact factor: 4.379

  1 in total

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